SAM Auto Line

The fully automated acoustic microscopes from the SAM Auto Line enable simple detection of cavities, voids, bubbles, inclusions, and delamination and are ideally suitable for wafer inspection, bond checking, and MEMS inspection. An automatic defect-review software package performs a fully automated evaluation of the entire wafer. The results can be issued as klarf files and VEGA MAP. A GEM/SECS connection is also possible.

Product Information

Find in-depth information about the possibilities of ultrasound inspection, our systems, transducers, and software as well as specific application possibilities.

Auto Wafer

  • More

    The SAM 300 Auto Wafer is product line specially developed for inline production control. It conforms to cleanroom class 10 and was designed for the inspection of wafers or bonded wafers (MEMS) to detect cavities, inclusions, or delamination in bonded layers.

    Product Information

Auto Tray

  • More

    This line was specially developed for the production control of electronic devices, boards, IGBTs, and other complex components. The systems conform to cleanroom class 10. The primary application involves verifying defects such as gaps, bubbles, holes, inclusions, delaminated areas, or thickness variations in soldered or Ag-sintered interfaces. Multiple layers can be inspected simultaneously.

    Product Information

Auto Ingot

  • More

    The Auto Ingot Line is an acoustic tomographic analysis system for the volume analysis of larger components. It was originally developed for the inspection of single crystal Si ingots, but can also be used to investigate other material systems such as Ge, GaAs etc. The devices are used to analyze pin holes or micro-voids on silicon ingots, with the focus on information about the defect size and defect depth.

    The system enables the measurement of 5–12 inch silicon ingots up to 400 mm long and weighing up to 75 kg. The defect resolution of pin holes in silicon is 100 µm. Other specific sample geometries can be developed for customers (sample holder and scanner), as can other scanning ranges.

    Product Information

Immediate Contact

slideoutcontact
You will receive a copy of your request in your inbox.
Please complete all fields marked with *.
captcha

PVA TePla Analytical Systems GmbH
Deutschordenstrasse 38
73463 Westhausen, Germany

Phone: +49 7363 9544 0
Fax: +49 7363 9544 113

Request Product Information

Please complete all fields and choose the product you would like to learn more about. The product data sheet will then be e-mailed to you. Please understand that in order to preserve our natural resources, we do not send out any printed material.

Product Information_info
Please complete all fields marked with *.

I am aware that when I make contact using this contact form, my data will be stored to facilitate the further processing of my inquiry and subsequent inquiries.